半導體製程技術(S1115141)
Course Period：Now ~ Any Time
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Course Intro
Course Plan
http://www.lhu.edu.tw/class_intro/CH/CH81052.htm
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SMT_ch01 Introduction
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SMT_ch04-Wafer Manufacturing, Epitaxy and Substrate Engineering
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SMT_ch03-Semiconductor Basics
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SMT_ch02-Introduction to IC Fabrication
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SMT_ch09-etching
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SMT_ch08-Ion implantation
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SMT_ch05-Thermal Processes
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SMT_ch06-photolithography
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ch15_半導體製程發展趨勢和總結
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ch1_導論
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ch2_積體電路製程介紹
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ch7_電漿製程
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ch12_化學機械研磨製程
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ch11_金屬化製程
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ch13_半導體製程整合
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ch8_離子佈植製程
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ch9_蝕刻製程
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ch3_半導體基礎
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ch10_化學氣相沉積與介電質薄膜
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ch4_晶圓製造
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ch5_加熱製程
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ch14_IC製程技術
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ch6_微影製程
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Chapt 1-XRD-2
Teacher / 石逸泉
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